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Título del libro: 2018 Ieee 7th World Conference On Photovoltaic Energy Conversion, Wcpec 2018 - A Joint Conference Of 45th Ieee Pvsc, 28th Pvsec And 34th Eu Pvsec
Título del capítulo: Optoelectronic Properties Improvement of pm-Si:H Films with Silane Flux Variation

Autores UNAM:
GUILLERMO SANTANA RODRIGUEZ;
Autores externos:

Idioma:
Inglés
Año de publicación:
2018
Palabras clave:

Deposition rates; Diffusion; Energy conversion; Metallic films; Photoelectrochemical cells; Photovoltaic cells; Silicon compounds; Bonding environment; Crystalline fractions; Exodiffusion; Flux variation; Optoelectronic properties; Photovoltaic devices; Polymorphous silicon; Structural and optical properties; Optical properties


Resumen:

this work describes the effect of silane flux on pm-Si:H films deposited by pecvd, with 3.5 torr, 210 °C and silane flux between 16-40 sccm. The augment of the silane flux increase the deposition rate to 2.3 A/s. The crystalline fraction varies from 9% to 17%. Exodiffusion experiments were related to structural and optical properties to understand their growth by analysis of bonding environment. The hydrogen stability and its amount bonded in these films are enhanced as the flux decreases. The optical gap decrease from 1.76 to 1.7 eV with silane flux. These could improve the stability of photovoltaic devices. © 2018 IEEE.


Entidades citadas de la UNAM: