1 | Adsorption and desorption kinetics of airborne ammonia on chromium-coated wafer in cleanroom depending on humidity and NH3 concentration | 2ᵒ autor: Gonzalez-Aguirre P., Tran M.-P., Beitia C., Lundgren J., et al. | 2020 | MICROELECTRONIC ENGINEERING | WoS-id: 000540691900001 Scopus-id: 2-s2.0-85085270662
| 2 | 3 |
2 | Diffusion and solubility of common microelectronic airborne molecular contaminants into pei thin polymer membranes and its related contamination control applications | 1ᵉʳ autor: González-Aguirre P., Tran M.P., Herrán F., Moon S.I., et al. | 2020 | Defect and Diffusion Forum | Scopus-id: 2-s2.0-85083973610
| 0 | 0 |
3 | Ammonia sorption outgassing and cross contamination ability of Entegris FOUPs evaluation and its volatile acids comparison | 1ᵉʳ autor: González-Aguirre P., Hérran F., Moon S.-I., Tran M.-P., et al. | 2019 | MICROELECTRONIC ENGINEERING | WoS-id: 000456903100009 Scopus-id: 2-s2.0-85059552410
| 4 | 5 |
4 | Deposition of hydrogen chloride gas on copper wafer depending on humidity and HCl concentration | 2ᵒ autor: Gonzalez-Aguirre P., Tran M.-P., Beitia C., Lundgren J., et al. | 2019 | MICROELECTRONIC ENGINEERING | WoS-id: 000460851300001 Scopus-id: 2-s2.0-85060060503
| 10 | 10 |
5 | FOUP decontamination solutions to control AMCs in semiconductor fabs: Gas purge or wet cleaning? | 1ᵉʳ autor: González-Aguirre P., Fontaine H., Moon S.I., Beitia C., et al. | 2018 | MICROELECTRONIC ENGINEERING | WoS-id: 000433265900004 Scopus-id: 2-s2.0-85042869308
| 7 | 11 |
6 | Determination of hcl transport coefficients in real foup polymers for hcl cross-contamination assessment from foup to wafer | 2ᵒ autor: Gonzalez-Aguirre P., Tran M.-P., Beitia C., Lungren J., et al. | 2018 | Solid State Phenomena | Scopus-id: 2-s2.0-85055409746
| 0 | 1 |
7 | Comparison of HF and HCl cross-contamination between different ENTEGRIS FOUP platforms and Cu-coated wafers | 2ᵒ autor: González-Aguirre P., Herrán F., Beitia C., Ohlsen J., et al. | 2017 | MICROELECTRONIC ENGINEERING | WoS-id: 000392901500006 Scopus-id: 2-s2.0-84999154610
| 8 | 11 |
8 | HF transport coefficients in polymers used for microelectronic applications | 1ᵉʳ autor: González-Aguirre P., Fontaine H., Beitia C., Pastorello R., et al. | 2016 | Defect and Diffusion Forum | Scopus-id: 2-s2.0-85042855415
| 0 | 5 |
9 | Control of HF volatile contamination in FOUP environment by advanced polymers and clean gas purge | 1ᵉʳ autor: González-Aguirre P., Fontaine H., Beitia C., Ohlsen J., et al. | 2015 | Solid State Phenomena | Scopus-id: 2-s2.0-84914126789
| 0 | 6 |
10 | A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials | 1ᵉʳ autor: González-Aguirre P., Fontaine H., Beitia C., Ohlsen J., et al. | 2013 | MICROELECTRONIC ENGINEERING | WoS-id: 000316529600022 Scopus-id: 2-s2.0-84886800692
| 9 | 16 |
11 | Study of the Morphology and Rheological Behavior of Polymer-Modified Asphalt Blends Prepared with Poly(Styrene-b-Butadiene-b-Styrene) and Poly(Styrene-b[(Butadiene)(1-x)-(Ethylene-co-Butylene)(x)]-b-Styrene) of Star-Like Molecular Architecture | 1ᵉʳ autor: Aguirre P.G., Torres L.M., Fonteix C., Pla F., et al. | 2013 | POLYMER ENGINEERING AND SCIENCE | WoS-id: 000329198700023 Scopus-id: 2-s2.0-84886096412
| 11 | 10 |
12 | Synthesis of alkyl and fluoroalkyl chains containing thioether-phosphines | Coautor: Gonzalez-Aguirre, P, Lopez-Vinasco, AM, Bruce, M, Rosas-Hernandez, A, et al. | 2010 | Synthesis-Stuttgart | WoS-id: 000284535900026 Scopus-id: 2-s2.0-78650296997
| 2 | 2 |
13 | Morphology and Rheological Behavior of Maltene-polymer Blends. I. Effect of Partial Hydrogenation of Poly(styrene-block-butadiene-block-styrene-block)-Type Copolymers | 1ᵉʳ autor: González-Aguirre P., Medina-Torres L., Schrauwen C., Fonteix C., et al. | 2009 | JOURNAL OF APPLIED POLYMER SCIENCE | WoS-id: 000264247300027 Scopus-id: 2-s2.0-64249149762
| 16 | 15 |